分类： 光学 >> 量子光学 提交时间： 2023-02-19
摘要： Whispering gallery mode (WGM) microcavities have been widely used for high-sensitivity ultrasound detection, due to their optical and mechanical resonances enhanced sensitivity. The ultrasound sensitivity of the cavity optomechanical system is fundamentally limited by the thermal noise. In this work, we theoretically and experimentally investigate the thermal-noise-limited sensitivity of a WGM microdisk ultrasound sensor, and optimize the sensitivity by varying the radius and thickness of the microdisk, as well as using a trench structure around the disk. Using a microdisk with a radius of 300 um and thickness of 2 um, a peak sensitivity of 1.18 uPa Hz^{-1/2} is achieved at 82.6 kHz, which is to our knowledge the record sensitivity among the cavity optomechanical ultrasound sensors. Such high sensitivity can improve the detection range of air-coupled ultrasound sensing technology.
分类： 光学 >> 量子光学 提交时间： 2023-02-19
Hao Yang
Zhi-Gang Hu
Yuechen Lei
Xuening Cao
Min Wang
Jialve Sun
Changhui Li
Zhanchun Zuo
Xiulai Xu
Bei-Bei Li
摘要： Owing to their dual-resonance enhanced sensitivity, cavity optomechanical systems provide an ideal platform for ultrasound sensing. In this work, we realize high sensitivity air-coupled ultrasound sensing from kilohertz (kHz) to megahertz (MHz) frequency range based on whispering gallery mode microcavities. Using a 57 um-diameter microtoroid with high optical Q factor (~10^7) and mechanical Q factor (~700), we achieve sensitivities of 46 uPa Hz^{-1/2}-10 mPa Hz^{-1/2} in a frequency range of 0.25-3.2 MHz. Thermal-noise-limited sensitivity is realized around the mechanical resonance at 2.56 MHz, in a frequency range of 0.6 MHz. We also observe the second- and third-order mechanical sidebands, and quantitatively study the intensities of each mechanical sideband as a function of the mechanical displacement. Measuring the combination of signal to noise ratios at all sidebands has the potential to extend the dynamic range of ultrasound sensing. In addition, to improve the ultrasound sensitivity in the kHz frequency range, we use a microdisk with a diameter of 200 um, and achieve sensitivities of 1.83 uPa Hz^{-1/2}-10.4 mPa Hz^{-1/2} in 30 kHz-1.65 MHz range.
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