Ultra-compact Si/In$_2$O$_3$ hybrid plasmonic waveguide modulator with a high bandwidth beyond 40 GHz

分类： 光学 >> 量子光学 提交时间： 2023-02-19

Yishu Huang Jun Zheng Bingcheng Pan Lijia Song Guanan Chen Zejie Yu Hui Ye Daoxin Dai

摘要： Optical modulators are required to have high modulation bandwidths and a compact footprint. In this paper we experimentally demonstrate a novel Si/In$_2$O$_3$ hybrid plasmonic waveguide modulator, which is realized by an asymmetric directional coupler (ADC) consisting of a silicon photonic waveguide and a Si/In$_2$O$_3$ hybrid plasmonic waveguide. The optical signal is modulated by radio-frequency (RF) signal applied on the Au electrodes at the top of MOS capacitor and contacting the In$_2$O$_3$ thin film. The record-high modulation bandwidth of >40 GHz is realized by a silicon-doping-free metal-oxide-In$_2$O$_3$ capacitor integrated in a 3.5-$\mu$m-long asymmetric directional coupler (ADC) for the first time.

同行评议状态:待评议

 点击量 31  下载量 19  评论