Spectroscopic Ellipsometry and Positron Annihilation Investigation of Sputtered HfO2 Films

Subjects: Physics >> Condensed Matter: Structural, Mechanical and Thermal Properties submitted time 2017-03-26

Z. W. Ma L. X. Liu Y. Z. Xie Y. R. Su H. T. Zhao B. Y Wang X. Z. Cao X. B. Qin J. Li

Abstract：Our results suggest that SE and PAS are effective techniques to study the optical and defect properties of HfO2 and the results provide insights for the fabrication of high-quality HfO2 thin films for optical application.

Peer Review Status:Awaiting Review

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